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Yoon-ho Son

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Plasma-assisted dry etching of ferroelectric capacitor modules and application to a 32M ferroelectric random access memory devices with submicron feature sizes

2002 Japanese Journal of Applied Physics
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Integration of ferroelectric random access memory devices with Ir/IrO2/Pb(ZrxTi1-x)O3/Ir capacitors formed by metalorganic chemical vapor deposition-grown Pb(ZrxTi1-x)O3

2002 Japanese Journal of Applied Physics
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