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Development of a New TaN Etchant for Metal Gate
Development of a New TaN Etchant for Metal Gate
2007
Mong Sup Lee
Sang-Yong Kim
Ji-Hoon Cha
Jeong-Nam Han
Im-soo Park
Kun-tack Lee
Chang Ki Hong
Han-Ku Cho
Joo-Tae Moon
Keywords:
Metal gate
Etching (microfabrication)
Composite material
Metallurgy
Materials science
Correction
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