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Blomberg Tom
Blomberg Tom
Inorganic chemistry
Tin
Chemistry
3
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水素還元雰囲気下でTDMAT(テトラキスジメチルアミノチタン)を用いた低温・低抵抗率PEALD(プラズマ原子層蒸着)TiN
2008
Journal of The Electrochemical Society
Caubet Pierre
Blomberg Tom
Benaboud Rym
Wyon Christophe
Blanquet Elisabeth
Gonchond Jean-Pierre
Juhel Marc
Bouvet Philippe
Gros-Jean Mickaeel
Michailos Jean
Richard Claire
Iteprat Blaise
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水素還元雰囲気下でTDMAT(テトラキスジメチルアミノチタン)を用いた低温・低抵抗率PEALD(プラズマ原子層蒸着)TiN
2008
Journal of The Electrochemical Society
Caubet Pierre
Blomberg Tom
Benaboud Rym
Wyon Christophe
Blanquet Elisabeth
Gonchond Jean‐Pierre
Juhel Marc
Bouvet Philippe
Gros‐Jean Mickaeel
Michailos Jean
Richard Claire
Gravenstein Js
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水素還元雰囲気下でTDMAT(テトラキスジメチルアミノチタン)を用いた低温・低抵抗率PEALD(プラズマ原子層蒸着)TiN | 文献情報 | J-GLOBAL 科学技術総合リンクセンター
2008
Journal of The Electrochemical Society
Caubet Pierre
Blomberg Tom
Benaboud Rym
Wyon Christophe
Blanquet Elisabeth
Gonchond Jean-Pierre
Juhel Marc
Bouvet Philippe
Gros-Jean Mickaeel
Michailos Jean
Richard Claire
Iteprat Blaise
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