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水素還元雰囲気下でTDMAT(テトラキスジメチルアミノチタン)を用いた低温・低抵抗率PEALD(プラズマ原子層蒸着)TiN
水素還元雰囲気下でTDMAT(テトラキスジメチルアミノチタン)を用いた低温・低抵抗率PEALD(プラズマ原子層蒸着)TiN
2008
Caubet Pierre
Blomberg Tom
Benaboud Rym
Wyon Christophe
Blanquet Elisabeth
Gonchond Jean-Pierre
Juhel Marc
Bouvet Philippe
Gros-Jean Mickaeel
Michailos Jean
Richard Claire
Iteprat Blaise
Keywords:
Chemistry
Inorganic chemistry
Tin
Correction
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