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Robb McCauley
Robb McCauley
Motorola
X-ray lithography
Optoelectronics
Photoresist
Transistor
Lithography
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4
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Line-edge roughness reduction and CD slimming using hardback processing
2003
Richard D. Peters
Kevin D. Lucas
Jonathan L. Cobb
Colita Parker
Kyle Patterson
Robb McCauley
Monique Ercken
Frieda Van Roey
Nadia Vandenbroeck
Ivan Pollentier
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Citations (4)
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