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M.E. Vitali
M.E. Vitali
STMicroelectronics
Oxide
Annealing (metallurgy)
Electronic engineering
Engineering
Radiochemistry
5
Papers
15
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Tunnel oxide degradation under pulsed stress
2005
Microelectronics Reliability
G. Ghidini
C. Capolupo
G. Giusto
A. Sebastiani
B. Stragliati
M.E. Vitali
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Citations (3)
In situ steam generation (ISSG) versus standard steam technology: impact on oxide reliability
2005
Microelectronics Reliability
M. Langenbuch
Roberta Bottini
M.E. Vitali
G. Ghidini
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Citations (5)
Point defects in thermal SiO2 layers: Thermally stimulated luminescence and corona oxide electrical characterization
2003
Journal of Applied Physics
A. Vedda
A. Bonelli
M. Martini
E. Rosetta
G. Spinolo
M.E. Vitali
M. Alessandri
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Citations (2)
Nitrided Silicon-Silicon Dioxide Interface: Electrical And Physico-Chemical Characterization By Complementary Surface Analysis Techniques
2002
Lia Vanzetti
Erica Iacob
Mario Barozzi
Damiano Giubertoni
Massimo Bersani
M. Anderle
P. Bacciaglia
B. Crivelli
M. L. Polignano
M.E. Vitali
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Phosphorous implantation in silicon through thin SiO2 layers: Oxide damage and postoxidation thermal treatments
2001
Journal of Applied Physics
A. Vedda
M. Martini
G. Spinolo
B. Crivelli
F. Cazzaniga
G. Ghidini
M.E. Vitali
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Citations (5)
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