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O. Brox
O. Brox
Sputtering
Materials science
Analytical chemistry
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Ultra-shallow junction depth profile analysis using TOF-SIMS and TXRF
1998
Characterization and Metrology for ULSI Technology
K. Iltgen
Brian J. MacDonald
O. Brox
Alfred Benninghoven
Cornelia A. Weiss
Tim Z. Hossain
Ehrenfried Zschech
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