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Shinji Yashima

5

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7

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Appareil de traitement de substrat et element d'electrode

2006
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Spatial distributions of ion-species in a large-volume inductively coupled plasma source

2001 Surface & Coatings Technology
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Large-area ion source combining microwaves with inductively coupled plasma

2000 Review of Scientific Instruments
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Effect of microwave ferrite on the density distribution of microwave-superposed inductively coupled plasma

2000 Vacuum
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Non-magnetic Plasma Source which Combines Microwaves with an Inductively Coupled Plasma

1998
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