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T. Onogawa

Kanazawa Institute of Technology

3

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10

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Spatial distributions of ion-species in a large-volume inductively coupled plasma source

2001 Surface & Coatings Technology
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Improvement of microwave ion source for higher B+ ion current

2000 Review of Scientific Instruments
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Large-area ion source combining microwaves with inductively coupled plasma

2000 Review of Scientific Instruments
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