author-photo

Takuya Kitano

Kanazawa University

4

Papers

0

Citations

Citation Trend

Filter By

Papers (4) Sort By

Journal Conference Others

Temporal Variations of Optical Emission Spectra in Microwave-Excited Plasma in Saturated Water Vapor under Reduced Pressure during Photoresist Removal

2021 Journal of Photopolymer Science and Technology
Show All
- Source
- Cite
- Save
Citations (0)
Investigation of Pulse Modulation Effect in Microwave Excited Bubble Plasma

2016 The Japan Society of Applied Physics
Show All
- Source
- Cite
- Save
Citations (0)
Time Resolved Optical Emission Spectroscopic Measurements in Microwave Excited Water Plasma during Ashing Process

2016 The Japan Society of Applied Physics
Show All
- Source
- Cite
- Save
Citations (0)
Development of High-speed and Environmentally Friendly Photoresist Removal Process using Pulsed Microwave Plasma in Water Vapor

2015 Bulletin of the American Physical Society
Show All
- Source
- Cite
- Save
Citations (0)