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Takuya Ito

Kanazawa University

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Investigation of Pulse Modulation Effect in Microwave Excited Bubble Plasma

2016 The Japan Society of Applied Physics
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Development of Water Plasma Asher Equipment for Minimal FAB.

2016 The Japan Society of Applied Physics
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Development of High-speed and Environmentally Friendly Photoresist Removal Process using Pulsed Microwave Plasma in Water Vapor

2015 Bulletin of the American Physical Society
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