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Time Resolved Optical Emission Spectroscopic Measurements in Microwave Excited Water Plasma during Ashing Process
Time Resolved Optical Emission Spectroscopic Measurements in Microwave Excited Water Plasma during Ashing Process
2016
Takuya Kitano
Hiroaki Suzuki
Arufua Shiota
Tatsuo Ishijima
Yasunori Tanaka
Yoshihiko Uesugi
Keywords:
Ashing
Plasma
Excited state
Analytical chemistry
Chemistry
Microwave
optical emission spectroscopy
Atomic physics
Correction
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