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Anthony S. Ratkovich

FSI International, Inc.

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Coater/developer process integration of metal-oxide based photoresist

2015 Proceedings of SPIE
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Selective Nitride Etching with Phosphoric and Sulfuric Acid Mixtures Using a Single-Wafer Wet Processor

2014 Solid State Phenomena
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Single Wafer Selective Silicon Nitride Removal with Phosphoric Acid and Steam

2014 Solid State Phenomena
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Novel Wet Etching of Silicon Nitride in a Single Wafer Spin Processor

2012 Solid State Phenomena
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