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Ted Ming-Lang Guo
Ted Ming-Lang Guo
United Microelectronics Corporation
Composite material
Materials science
Wafer
Dry etching
High-κ dielectric
4
Papers
2
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0
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Wet Etch Rate Behavior of Poly-Si in TMAH Solution at Various Ambient Gas Conditions
2014
Solid State Phenomena
Euing Lin
Ted Ming-Lang Guo
Chin-Cheng Chien
M.H. Chang
Wesley Yu
N.H. Yang
J. F. Lin
J.Y. Wu
Kenneth M. Robb
Alessandro Baldaro
A.N. Other
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Single Wafer Selective Silicon Nitride Removal with Phosphoric Acid and Steam
2014
Solid State Phenomena
Ted Ming-Lang Guo
Wesley Yu
Chin-Cheng Chien
Euing Lin
N.H. Yang
J. F. Lin
J.Y. Wu
Anthony S. Ratkovich
Don Kahaian
Jeffery W. Butterbaugh
Jeffrey M. Lauerhaas
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Static Charge Induced Damage during Lightly Doped Drain (LDD) by Single Wafer Cleaning Process
2012
Solid State Phenomena
Ted Ming-Lang Guo
Tsung Hsun Tsai
Chin-Cheng Chien
Michael Chan
Chan-Lon Yang
J.Y. Wu
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Clean Process Mechanism of HKMG during N-PMOS Patterning
2012
Solid State Phenomena
Autumn Yeh
Kai Ping Wang
Zhi Jian Wang
Chin-Cheng Chien
Ted Ming-Lang Guo
Michael Chan
Chan-Lon Yang
J.Y. Wu
Samantha Tan
Alex Kabansky
Tehtien Su
Jack Kao
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