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Kouji Shimomura
Kouji Shimomura
Chemistry
Inorganic chemistry
Metal
Materials science
Silicate
4
Papers
14
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Periodic oxidation for fabricating titanium oxynitride thin films via atomic layer deposition
2016
Journal of Vacuum Science and Technology
Shinya Iwashita
Shintaro Aoyama
Masayuki Nasu
Kouji Shimomura
Naotaka Noro
Toshio Hasegawa
Yasushi Akasaka
Kohei Miyashita
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Citations (10)
基板処理方法、コンピュータ可読記録媒体、基板処理装置、および基板処理システム
2007
Miki Aruga
Kazuyoshi Yamazaki
Shintaro Aoyama
Kouji Shimomura
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Control of Material Interactions in Advanced High-k Metal Gate Stacks
2006
Cory Wajda
Gert Leusink
Koji Akiyama
Shigeo Ashigaki
Shintaro Aoyama
Kouji Shimomura
Miki Aruga
Tsuyoshi Takahashi
Kazuyoshi Yamazaki
Hideaki Yamasaki
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Procédé de formation d’un film de silicate de métal et support d’impression
2006
Shintaro Aoyama
Tsuyoshi Takahashi
Kouji Shimomura
Miki Aruga
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