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Shintaro Aoyama

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Periodic oxidation for fabricating titanium oxynitride thin films via atomic layer deposition

2016 Journal of Vacuum Science and Technology
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A process for forming an insulating film and for substratverabeitungsvorrichtung

2001
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Procede de formation d'un film d'isolant de grille, appareil pour la formation d'un film d'isolant de grille et outil combine

2001
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