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Lisa R. Rich
Lisa R. Rich
Wavefront
Interferometry
Optics
Engineering
Lithography
5
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3
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Correction of 157-nm lens based on phase ring aberration extraction method
2004
Jeff Meute
Georgia K. Rich
Will Conley
Bruce W. Smith
Lena Zavyalova
Julian S. Cashmore
Dominic Ashworth
James E. Webb
Lisa R. Rich
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Characterizing the polarization dependence of system-wavefronts at 157nm induced by intrinsically birefringent material
2002
Horst Schreiber
Paul G. Dewa
Keith E. Hanford
Steve K. Mack
Lisa R. Rich
Paul Jay Tompkins
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Contamination and degradation of 157-nm stepper optical components: field experience at International SEMATECH
2002
Jeff Meute
Georgia K. Rich
Stefan Hien
Kim Dean
Carolyn Gondran
Julian S. Cashmore
Dominic Ashworth
James E. Webb
Lisa R. Rich
Paul G. Dewa
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157-nm system test for high-NA lithographic lens systems
2002
Horst Schreiber
Paul G. Dewa
K. Hanford
Robert Ligenza
Lisa R. Rich
Paul Jay Tompkins
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Semi-rigid mirrors with sparse actuators, thermal, and structural performance capabilities
2001
Gary Matthews
Lisa R. Rich
Calvin E. Abplanalp
Robert Egerman
Trevor Grover
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