A method of controlling a processing base

A method of controlling a mover device 10F that includes: a fixed base 11F; a movable base 12F that is moveable in a linear direction with respect to the fixed base; a processing base 13F that is movable in a linear direction with respect to the movable base, and an actuator 154 that is provided between the processing base and the movable base. The method includes the steps of: moving the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base, moving the movable base on the fixed base in the opposite direction to the direction of the processing base by virtue of a reaction force caused by moving the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base; and controlling the moving velocity of the processing base with respect to the fixed base.