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Satoshi Endo
Satoshi Endo
Toshiba
Phase-shift mask
Optics
Phase (waves)
Mask inspection
Wavelength
3
Papers
3
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257-nm wavelength mask inspection for 65-nm node reticles
2004
Ryoji Yoshikawa
Hiroyuki Tanizaki
Tomohide Watanabe
Hiromu Inoue
Riki Ogawa
Satoshi Endo
Masami Ikeda
Yoichiro Takahashi
Hidehiro Watanabe
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Detection of half-tone PSM pinhole with DUV reflected light source
2002
Takeshi Fujiwara
Hiromu Inoue
Kentaro Okuda
Takehiko Nomura
Mitsuo Tabata
Satoshi Endo
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Advanced die-to-database inspection technique for embedded attenuated phase shift mask
2002
Journal of Vacuum Science & Technology B
Kyoji Yamashita
Ikunao Isomura
Hideo Tsuchiya
Toshiyuki Watanabe
Hiromu Inoue
Satoshi Endo
Masakazu Tokita
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