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Kentaro Okuda
Kentaro Okuda
Toshiba
Mask inspection
Phase-shift mask
Optics
Photolithography
Electronic engineering
4
Papers
1
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0
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Detection of half-tone PSM pinhole with DUV reflected light source
2002
Takeshi Fujiwara
Hiromu Inoue
Kentaro Okuda
Takehiko Nomura
Mitsuo Tabata
Satoshi Endo
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Mask Defect Inspection Method by Database Comparison with $\bf 0.25\mbox{--}0.35\,\mbi{\mu} m$ Sensitivity
1994
Japanese Journal of Applied Physics
Toru Tojo
Mitsuo Tabata
Kyoji Yamashita
Hideo Tsuchiya
Toshiyuki Watanabe
Chikara Itoh
Akira Ono
Hiromu Inoue
Kentaro Okuda
Hisakazu Yoshino
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Mask defect inspection method by database comparison with 0.25-0.35 μm sensitivity
1994
Japanese Journal of Applied Physics
Toru Tojo
Mitsuo Tabata
Kyoji Yamashita
Hideo Tsuchiya
Toshiyuki Watanabe
Chikara Itoh
Akira Ono
Hiromu Inoue
Kentaro Okuda
Hisakazu Yoshino
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