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Hiroyuki Tanizaki
Hiroyuki Tanizaki
Toshiba
Reticle
Mask inspection
Electronic engineering
Phase-shift mask
Wavelength
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257-nm wavelength mask inspection for 65-nm node reticles
2004
Ryoji Yoshikawa
Hiroyuki Tanizaki
Tomohide Watanabe
Hiromu Inoue
Riki Ogawa
Satoshi Endo
Masami Ikeda
Yoichiro Takahashi
Hidehiro Watanabe
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