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Vincent E. Burkhart
Vincent E. Burkhart
Physics
Humanities
Support surface
Wafer
Particle
3
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Procede et appareil de prediction de defaillance d'un mandrin electrostatique
1999
Vijay Parke
Steven V. Sansoni
Vincent E. Burkhart
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Mandrin a capteurs piezo-electriques integres, destines a detecter une plaquette a semi-conducteur
1999
Karl M. Brown
Nitin Khurana
Vincent E. Burkhart
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Equipment for supporting workpiece in separation from support surface of workpiece supporting chuck and manufacture of separated mask
1997
Vincent E. Burkhart
Howard Grunes
Michael Sugarman
ii baakuhaato vinsento
ii guruunesu hawaado
enu syugaaman maikeru
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