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Howard Grunes
Howard Grunes
Applied Materials
Wafer
Materials science
Electronic engineering
Engineering
Mechanical engineering
8
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7
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Equipment for supporting workpiece in separation from support surface of workpiece supporting chuck and manufacture of separated mask
1997
Vincent E. Burkhart
Howard Grunes
Michael Sugarman
ii baakuhaato vinsento
ii guruunesu hawaado
enu syugaaman maikeru
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True wafer temperature during metallization in physical vapor deposition cluster tools
1994
Michael E. Adel
Shmuel Mangan
Howard Grunes
Vijay D. Parkhe
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Clamping mechanism for physical vapor deposition apparatus
1991
Avi Tepman
Howard Grunes
Dana Andrews
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Multi-chamber vacuum device with graduated vacuum levels for the treatment of semiconductor wafers
1990
Avi Tepman
Howard Grunes
Sasson Somekh
Dan Maydan
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