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Guy J. J. Brasseur
Guy J. J. Brasseur
Katholieke Universiteit Leuven
Silicon nitride
Analytical chemistry
Dry etching
Reactive-ion etching
Magnetic confinement fusion
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Audio frequency plasma generation reactor configurations for dry etch processing
1991
Microelectronic Engineering
Guy J. J. Brasseur
Pierre Bruneel
Christiane Jehoul
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