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B.P. van Drieenhuizen

Delft University of Technology

12

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535

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Novel Interconnection Technologies for Integrated Microfluidic Systems

1998
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Novel Interconnection and Channel Technologies for Microfluidics

1998
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Problems of sacrificial etching in the presence of aluminium interconnect

1997 Sensors and Actuators A-physical
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The development of a low-stress polysilicon process compatible with standard device processing

1996 IEEE\/ASME Journal of Microelectromechanical Systems
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Integrated micromachined electrostatic true RMS-to-DC converter

1995 CPEM | Conference on Precision Electromagnetic Measurements
- B.P. van Drieenhuizen
- R.F. Wolffenbuttel
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Citations (17)
Integrated Electrostatic RMS-to-DC Converter Using IC-Compatible Surface Micromachining

1995
- B.P. van Drieenhuizen
- R.F. Wolffenbuttel
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Integrated micromachined accurate electrostatic true rms-to-dc converter

1994 CPEM | Conference on Precision Electromagnetic Measurements
- B.P. van Drieenhuizen
- R.F. Wolffenbuttel
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Citations (2)
Comparison of techniques for measuring both compressive and tensile stress in thin films

1993 Sensors and Actuators A-physical
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Citations (137)
Optocoupler based on the avalanche light emission in silicon

1992 Sensors and Actuators A-physical
- B.P. van Drieenhuizen
- R.F. Wolffenbuttel
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Citations (37)