Novel Interconnection and Channel Technologies for Microfluidics

The growth of microfluidic applications for medical diagnostics and biological and chemical assays has created a need for fundamental building blocks from which fluidic systems can be constructed. This work discusses two of these building blocks: 1) interconnects for interfacing monolithic microfluidic systems to standard capillary tubing, and 2) conformal coating procedures for microfluidic channels using plasma enhanced chemical vapor deposited (PECVD) silicon carbide (SiC).