Old Web
English
Sign In
Acemap
>
authorDetail
>
S. OBrien
S. OBrien
Texas Instruments
Immersion (virtual reality)
Lithography
Resist
Nanotechnology
Immersion lithography
4
Papers
32
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (4)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Top coat or no top coat for immersion lithography
2006
Nickolay Stepanenko
Hyun-Woo Kim
Shinji Kishimura
D. Van den Heuvel
Nadia Vandenbroeck
Michael Kocsis
Philippe Foubert
Mireille Maenhoudt
Monique Ercken
F. Van Roey
Roel Gronheid
Ivan Pollentier
Diziana Vangoidsenhoven
Christie Delvaux
C. Baerts
S. OBrien
Wim Fyen
Greg Wells
Show All
Source
Cite
Save
Citations (8)
Immersion specific defect mechanisms : Findings and recommendations for their control
2006
Michael Kocsis
Dieter Van den Heuvel
Roel Gronheid
Mireille Maenhoudt
Dizana Vangoidsenhoven
Greg Wells
Nickolay Stepanenko
Michael Benndorf
Hyun-Woo Kim
Shinji Kishimura
Monique Ercken
Frieda Van Roey
S. OBrien
Wim Fyen
Philippe Foubert
Richard Moerman
Bob Streefkerk
Show All
Source
Cite
Save
Citations (15)
Advances in Immersion Related Defectivity on XT:1250i at IMEC
2006
Journal of Photopolymer Science and Technology
M. Meanhoudt
Michael Kocsis
Nickolay Stepanenko
S. OBrien
D. Van den Heuvel
Diziana Vangoidsenhoven
Roel Gronheid
Michael Benndorf
Kathleen Nafus
Wim Fyen
H. W. Kim
Shinji Kishimura
Kurt G. Ronse
Show All
Source
Cite
Save
Citations (2)
MMST manufacturing technology-hardware, sensors, and processes
1994
IEEE Transactions on Semiconductor Manufacturing
Gabriel G. Barna
Lee M. Loewenstein
Roger A. Robbins
S. OBrien
A. Lane
D.D. White
Maureen A. Hanratty
Jimmy W. Hosch
Gregory B. Shinn
Kelly J. Taylor
K. Brankner
Show All
Source
Cite
Save
Citations (7)
1