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Hiraku Ishikawa
Hiraku Ishikawa
Tohoku University
Materials science
Amorphous solid
Dielectric
Copper
Hydrocarbon
4
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Procédé pour traiter un film de carbone amorphe, et procédé de fabrication de dispositif à semi-conducteur utilisant ledit procédé
2009
Hiraku Ishikawa
Takaaki Matsuoka
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Evaluation of New Amorphous Hydrocarbon Film for Copper Barrier Dielectric Film in Low-k Copper Metallization
2008
Japanese Journal of Applied Physics
Hiraku Ishikawa
Toshihisa Nozawa
Takaaki Matsuoka
Akinobu Teramoto
Masaki Hirayama
Takashi Ito
Tadahiro Ohmi
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The Evaluation of New Amorphous Hydrocarbon Film aCHx, for Copper Barrier Dielectric Film in Low-k Copper Metallization
2007
The Japan Society of Applied Physics
Hiraku Ishikawa
Toshihisa Nozawa
Takaaki Matsuoka
Akinobu Teramoto
Masaki Hirayama
Takashi Ito
Tadahiro Ohmi
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Film de carbone amorphe, dispositif semi-conducteur, procédé de formation de film, appareil de formation de film et support de stockage
2007
Yoshiyuki Kikuchi
Yasuo Kobayashi
Kohei Kawamura
Toshihisa Nozawa
Hiraku Ishikawa
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