Old Web
English
Sign In
Acemap
>
authorDetail
>
Wolfgang Scherm
Wolfgang Scherm
Actuator
Lithography
Optics
Materials science
Optoelectronics
4
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (4)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Projection exposure system for semiconductor lithography and their components and manufacturing process of such components
2016
Michael Erath
Wolfgang Scherm
Timo Laufer
Franz-Josef Stickel
Show All
Source
Cite
Save
Citations (0)
An optical device as well as lithography system
2015
Stacy Figueredo
Dirk Jürgens
Ricarda Schömer
Wolfgang Scherm
Franz-Josef Stickel
Christian Mühlke
Pascal Marsollek
Markus Happel
Maarten Dekker
Maurice Teuwen
Show All
Source
Cite
Save
Citations (0)
Projection lens wavefront manipulator
2015
Maike Trenkel-Lenz
Wolfgang Scherm
Holger Walter
Vladimir Kamenov
Michael Stolz
Johannes Lippert
Axel Lorenz
Andreas Frommeyer
Claudia Ekstein
Pascal Marsollek
Stephanus Fengler
Wolfgang Emer
Ulrich Löring
Boris Bittner
Show All
Source
Cite
Save
Citations (0)
Vorrichtung und Verfahren zur Vermessung von Lithographiemasken
2006
Armin Bich
Monika Frey
Albrecht Hof
Helmut Krause
Günter Maul
Rainer Maul
Dietmar Neugebauer
Stefan Otto
Wolfgang Scherm
Show All
Source
Cite
Save
Citations (0)
1