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Gökay Yegen
Gökay Yegen
ASML Holding
Materials science
Extreme ultraviolet lithography
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Carbon nanotube pellicles: imaging results of the first full-field extreme ultraviolet exposures
2021
Joost Bekaert
Emily Gallagher
Rik Jonckheere
Lieve Van Look
Remko Aubert
Vineet Vijayakrishnan Nair
Marina Y. Timmermans
Ivan Pollentier
Eric Hendrickx
Alexander Klein
Gökay Yegen
Par Broman
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CNT pellicles: Imaging results of the first full-field EUV exposures
2021
Joost Bekaert
Emily Gallagher
Rik Jonckheere
Lieve Van Look
Remko Aubert
Vineet Vijayakrishnan Nair
Marina Y. Timmermans
Ivan Pollentier
Eric Hendrickx
Alexander Klein
Gökay Yegen
Par Broman
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Citations (1)
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