CNT pellicles: Imaging results of the first full-field EUV exposures

We report imaging results from the first CNT pellicle exposures on an EUV scanner, with EUV transmission up to 98%. We experimentally evaluated multiple pellicles mounted on different masks, by printing wafers and performing measurements of CD, dose, and flare. In general, the effect of the CNT pellicles on the imaging was found to be limited, and correctable based on measurements of transmission, CD, and dose. Our results focus on: • Relation between pellicle transmission and dose-to-size w/wo pellicle • Impact of the pellicle on intra-field uniformity • Scattering from the pellicle A highly transparent pellicle enables higher yield and throughput for HVM.