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Zhang Yunchi
Zhang Yunchi
Sputter deposition
Computational physics
Sputtering
Hybrid system
Monte Carlo method
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A hybrid simulation of sputtering-deposition process: combined fluid and Monte-Carlo model
2000
High Power Laser and Particle Beams
Zhang Yunchi
Zhao Kui
Zhang Bao-cheng
Xie Dalin
Tang Yuxing
Yang Xi
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