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A hybrid simulation of sputtering-deposition process: combined fluid and Monte-Carlo model
A hybrid simulation of sputtering-deposition process: combined fluid and Monte-Carlo model
2000
Zhang Yunchi
Zhao Kui
Zhang Bao-cheng
Xie Dalin
Tang Yuxing
Yang Xi
Keywords:
Sputter deposition
Computational physics
Sputtering
Hybrid system
Monte Carlo method
Materials science
Mathematical model
process
Plasma
Deposition (phase transition)
Correction
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