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B. Robichaud
B. Robichaud
Freescale Semiconductor
Surface roughness
Analytical chemistry
Angle of incidence
Ion
Beam (structure)
2
Papers
3
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0
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Toward accurate characterization of nitrogen depth profiles in ultrathin oxynitride films
2008
Surface and Interface Analysis
Z. X. Jiang
K. Kim
D. D. Sieloff
Tien Ying Luo
A. Varghese
D. H. Triyoso
T. Guenther
B. Robichaud
J. Benavides
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Citations (1)
Low energy secondary ion mass spectrometry with sub-keV O2+ beams at glancing incidence
2008
Journal of Vacuum Science and Technology
Z. X. Jiang
K. Kim
T. Guenther
B. Robichaud
J. Benavides
L. Contreras
D. D. Sieloff
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Citations (2)
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