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Stefan Klett

Technische Universität Ilmenau

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Scanning proximal probes for parallel imaging and lithography

2008 Journal of Vacuum Science & Technology B
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Dispositif et procédé de positionnement et de manipulation micro-mécanique d'un objet

2008
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Apparatus and method for micro-mechanical positioning and manipulation of an object

2007
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Duo-action electro thermal micro gripper

2007 Microelectronic Engineering
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