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J.-P. Zöllner

Technische Universität Ilmenau

6

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88

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Towards alternative 3D nanofabrication in macroscopic working volumes

2018 Measurement Science and Technology
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Realization of cantilever arrays for parallel proximity imaging

2010
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Parallel proximal probe arrays with vertical interconnections

2009 Journal of Vacuum Science & Technology B
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Scanning proximal probes for parallel imaging and lithography

2008 Journal of Vacuum Science & Technology B
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Duo-action electro thermal micro gripper

2007 Microelectronic Engineering
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