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Min-Feng Hung
Min-Feng Hung
Etching
Electronic engineering
Optoelectronics
Electric arc
Reactive-ion etching
3
Papers
18
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0
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Reduction of wafer arcing during high aspect ratio etching
2017
MIPRO | International Convention on Information and Communication Technology, Electronics and Microelectronics
Zusing Yang
Min-Feng Hung
Kuo-Pin Chang
Chih-Yao Lin
Sheng-Yuan Chang
Hong-Ji Lee
Nan-Tzu Lian
Tahone Yang
Kuang-Chao Chen
Chih-Yuan Lu
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Reduction of wafer arcing during high aspect ratio etching
2017
ASMC | Advanced Semiconductor Manufacturing Conference
Zusing Yang
Min-Feng Hung
Kuo-Pin Chang
Chih-Yao Lin
Sheng-Yuan Chang
Hong-Ji Lee
Nan-Tzu Lian
Tahone Yang
Kuang-Chao Chen
Chih-Yuan Lu
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A novel double-density, single-gate vertical channel (SGVC) 3D NAND Flash that is tolerant to deep vertical etching CD variation and possesses robust read-disturb immunity
2015
IEDM | International Electron Devices Meeting
Hang-Ting Lue
Tzu-Hsuan Hsu
Chen Jun-wu
Wei-Chen Chen
Teng-Hao Yeh
Kuo-Pin Chang
Chih-Chang Hsieh
Pei-Ying Du
Yi-Hsuan Hsiao
Yu Wei-jiang
Guan-Ru Lee
Roger Lo
Yan-Ru Su
Chiatze Huang
Sheng-Chih Lai
Li Yang-liang
Chieh-Fang Chen
Min-Feng Hung
Chih-Wei Hu
Chia-Jung Chiu
Chih-Yuan Lu
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Citations (16)
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