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Yee-Kai Lai
Yee-Kai Lai
Nanolithography
Materials science
Analytical chemistry
X-ray lithography
Stencil lithography
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Direct patterning on low dielectric constant materials with electron beam lithography
2001
MNC | International Microprocesses and Nanotechnology Conference
Ben-Chang Chen
Yee-Kai Lai
Fu-Hsiang Ko
Cheng-Tung Chou
Hsuen-Li Chen
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