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Helene Richter
Helene Richter
Fraunhofer Society
Wafer
Engineering
Contamination control
Manufacturing engineering
Electronic engineering
4
Papers
4
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Contamination Control for Wafer Container Used within 300 mm Manufacturing for Power Microelectronics
2016
Solid State Phenomena
Germar Schneider
Thi Quynh Nguyen
Matthias Taubert
Julien Bounouar
Catherine Le Guet
Andreas Leibold
Helene Richter
Markus Pfeffer
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Enhanced contamination control methods in advanced wafer processing
2016
ISSM | International Symposium on Semiconductor Manufacturing
Markus Pfeffer
Helene Richter
Roswitha Altmann
Andreas Leibold
Anton J. Bauer
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Advanced detection method for polymer residues on semiconductor substrates: 3D/TSV/interposer: Through silicon via and packaging
2016
ASMC | Advanced Semiconductor Manufacturing Conference
Helene Richter
Lothar Pfitzner
Markus Pfeffer
Anton J. Bauer
J. Siegert
T. Bodner
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Advanced contamination control methods for yield enhancement
2015
ASMC | Advanced Semiconductor Manufacturing Conference
Helene Richter
Andreas Leibold
Roswitha Altmann
B. Doffek
J. Koebl
Markus Pfeffer
Anton J. Bauer
Germar Schneider
D. Cheung
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