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Michael Eugene Givens
Michael Eugene Givens
ASM International
Density functional theory
Etching (microfabrication)
Thermal
Materials science
Carbon tetrachloride
2
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3
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0
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Combining Experimental and DFT Investigation of the Mechanism Involved in Thermal Etching of Titanium Nitride Using Alternate Exposures of NbF5 and CCl4, or CCl4 Only
2021
Advanced Materials Interfaces
Varun Sharma
Suresh Kondati Natarajan
Simon D. Elliott
Tom E. Blomberg
Suvi Haukka
Michael Eugene Givens
Marko Tuominen
Mikko Ritala
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Thermal Atomic Layer Etching of Aluminum Oxide (Al2O3) Using Sequential Exposures of Niobium Pentafluoride (NbF5) and Carbon Tetrachloride (CCl4): A Combined Experimental and Density Functional Theory Study of the Etch Mechanism
2021
Chemistry of Materials
Sharma Varun
Simon D. Elliott
Tom E. Blomberg
Suvi Haukka
Michael Eugene Givens
Marko Tuominen
Mikko Ritala
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Citations (3)
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