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Chikara Itoh
Chikara Itoh
Toshiba
Optics
Physics
Acceleration voltage
Cathode ray
projection system
4
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4
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Mask Defect Inspection Method by Database Comparison with $\bf 0.25\mbox{--}0.35\,\mbi{\mu} m$ Sensitivity
1994
Japanese Journal of Applied Physics
Toru Tojo
Mitsuo Tabata
Kyoji Yamashita
Hideo Tsuchiya
Toshiyuki Watanabe
Chikara Itoh
Akira Ono
Hiromu Inoue
Kentaro Okuda
Hisakazu Yoshino
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Mask defect inspection method by database comparison with 0.25-0.35 μm sensitivity
1994
Japanese Journal of Applied Physics
Toru Tojo
Mitsuo Tabata
Kyoji Yamashita
Hideo Tsuchiya
Toshiyuki Watanabe
Chikara Itoh
Akira Ono
Hiromu Inoue
Kentaro Okuda
Hisakazu Yoshino
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Electron Beam Image Projection System with High Accelerating Voltage
1985
The Japan Society of Applied Physics
Irchiro Mori
Toshiaki Shinozaki
Kazuyoshi Sugihara
Chikara Itoh
Mitsuo Tabata
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An electron beam image projection system with automatic wafer handling
1985
Microelectronic Engineering
Ichiro Mori
Kazuyoshi Sugihara
Chikara Itoh
Mitsuo Tabata
Toshiaki Shinozaki
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