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Gregory McIntyre
- IBM
- University of California, Berkeley
47
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258
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Citations (10) - Evaluation of non-actinic EUV mask inspection and defect printability on multiple EUV mask absorbersShow All
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Citations (4) - 2013 Proceedings of SPIEShow All
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Citations (13) - 2013 Spie Newsroom
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Citations (7) - 2012 Proceedings of SPIE
- Obert Wood
- John C. Arnold
- Timothy A. Brunner
- Martin Burkhardt
- James Chen
- Deniz E. Civay
- Susan S.-C. Fan
- Emily Gallagher
- Scott Halle
- Ming He
- Craig Higgins
- Hirokazu Kato
- Jongwook Kye
- Chiew-seng Koay
- Guillaume Landie
- Pak Leung
- Gregory McIntyre
- Satoshi Nagai
- Karen Petrillo
- Sudhar Raghunathan
- Ralph Schlief
- Lei Sun
- Alfred Wagner
- Tom Wallow
- Yunpeng Yin
- Xuelian Zhu
- Matthew E. Colburn
- Daniel Corliss
- Cecilia C. Smolinski
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