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Baojun Liu
Baojun Liu
University of Electronic Science and Technology of China
Materials science
Electronic engineering
Wafer dicing
Laser
Wafer
3
Papers
2
Citations
0
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Design on MEMS-based 3D biochip for drug-released dispenser
2017
Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems
Hsiang-Chen Hsu
Li-Ming Chu
Baojun Liu
Chien-Yuan Lai
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An investigation on dicing 28-nm node Cu/low-k wafer with a Picosecond Pulse Laser
2014
Hsiang-Chen Hsu
Li-Ming Chu
Baojun Liu
Chih-Chiang Fu
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An experimental study on dicing 28 nm low-k water using laser grooving technique
2014
IMPACT | International Microsystems, Packaging, Assembly and Circuits Technology Conference
Hsiang-Chen Hsu
Cheng-Jiun Han
Li-Ming Chu
Shih-Jeh Wu
Chih-Chiang Fu
Shen-Li Fu
Baojun Liu
Chen-Yi Wang
Po-Chun Jung
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