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Jonathan Grohs
Jonathan Grohs
IBM
Reflectivity
Wafer
Engineering
Optics
Extreme ultraviolet lithography
1
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EUV mask black border evolution
2014
Christina Turley
Ravi Bonam
Emily Gallagher
Jonathan Grohs
Masayuki Kagawa
Louis Kindt
Eisuke Narita
Steven C. Nash
Yoshifumi Sakamoto
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