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Tejal Goyani
Tejal Goyani
Hafnium
Thin film
Silicate
Materials science
Inorganic chemistry
3
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CVD of Hafnium Silicate thin films for Advanced Gate Applications
2006
Rahul Sharangpani
Shankar Muthukrishnan
Shreyas Kher
Pravin K. Narwankar
Tejal Goyani
Khaled Ahmed
Yi Ma
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Depot en phase vapeur de matieres de silicate de hafnium utilisant du tris(dimethylamido)silane
2006
Shankar Muthukrishnan
Tejal Goyani
Rahul Sharangpani
Shreyas Kher
Pravin K. Narwankar
Khaled Ahmed
Yi Ma
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CVD of hafnium silicate thin films for advanced gate applications
2005
Rahul Sharangpani
Shankar Muthukrishnan
Shreyas Kher
Pravin K. Narwankar
Tejal Goyani
Yi Ma
Khaled Ahmed
Guissepina Conti
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