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CVD of Hafnium Silicate thin films for Advanced Gate Applications
CVD of Hafnium Silicate thin films for Advanced Gate Applications
2006
Rahul Sharangpani
Shankar Muthukrishnan
Shreyas Kher
Pravin K. Narwankar
Tejal Goyani
Khaled Ahmed
Yi Ma
Keywords:
Thin film
Metallurgy
Silicate
Hafnium
Materials science
Ceramic materials
Nanotechnology
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