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Jaz Bansel
Jaz Bansel
University of Wisconsin-Madison
X-ray lithography
Fabrication
Lithography
Photoresist
Emissivity
2
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X-ray mask fabrication at CXrL
1999
Q. Leonard
Jaz Bansel
Lei Yang
Olga Vladimirsky
Srinivas B. Bollepalli
Mumit Khan
Yuli Vladimirsky
Franco Cerrina
James W. Taylor
Klaus Simon
L. Rathbun
R.C. Tiberio
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Heating of x-ray masks during e-beam writing
1999
Nikolai L. Krasnoperov
Jaz Bansel
Olga Vladimirsky
J. Wallace
Yuli Vladimirsky
Franco Cerrina
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