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Lei Yang
Lei Yang
University of Wisconsin-Madison
Optics
Lithography
Phase-shift mask
Radiation
Fabrication
5
Papers
20
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Bright peak enhanced x-ray clear phase mask
2002
Journal of Vacuum Science & Technology B
Lei Yang
Franco Cerrina
James W. Taylor
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Citations (3)
Study of x-ray phase-shifting masks for sub-70 nm patterning
2001
Journal of Vacuum Science & Technology B
Lei Yang
James W. Taylor
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Citations (8)
Processing latitude study on x-ray phase-shifting masks
2000
Lei Yang
Mumit Khan
James W. Taylor
Yuli Vladimirsky
Niru V. Dandekar
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Citations (7)
Fabrication of x-ray phase masks for sub-70-nm imaging
1999
Lei Yang
Yuli Vladimirsky
James W. Taylor
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Citations (2)
X-ray mask fabrication at CXrL
1999
Q. Leonard
Jaz Bansel
Lei Yang
Olga Vladimirsky
Srinivas B. Bollepalli
Mumit Khan
Yuli Vladimirsky
Franco Cerrina
James W. Taylor
Klaus Simon
L. Rathbun
R.C. Tiberio
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