Old Web
English
Sign In
Acemap
>
authorDetail
>
Dean C. Humphrey
Dean C. Humphrey
IBM
Photolithography
Electronic engineering
Engineering
Process window
Materials science
5
Papers
5
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (4)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Manufacturing optimization strategies for 0.35-μm design rules
1997
Jacek K. Tyminski
Sean J. McNamara
Toshihiro Sasaya
Masaya Komatsu
Dean C. Humphrey
Arthur C. Winslow
Show All
Source
Cite
Save
Citations (0)
FC2: focus control technique for critical level i-line photolithography
1997
ASMC | Advanced Semiconductor Manufacturing Conference
S.D. Dickson
Jacek K. Tyminski
Sean J. McNamara
Dean C. Humphrey
D. Ziemer
Show All
Source
Cite
Save
Citations (2)
Manufacturing implementation of deep-UV lithography for 500-nm devices
1992
Steven J. Holmes
Albert S. Bergendahl
Diana D. Dunn
J. Guidry
Mark C. Hakey
Karey L. Holland
Andy Horr
Dean C. Humphrey
Stephen E. Knight
D. Macaluso
Katherine C. Norris
Denis J Poley
Paul A. Rabidoux
John L. Sturtevant
Dean Writer
Show All
Source
Cite
Save
Citations (0)
Half-micrometer linewidth metrology
1991
Stephen E. Knight
Dean C. Humphrey
Reginald R. Bowley
Robert M. Cogley
Show All
Source
Cite
Save
Citations (2)
1