Old Web
English
Sign In
Acemap
>
authorDetail
>
Karey L. Holland
Karey L. Holland
IBM
Electronic engineering
Materials science
Optics
Dram
Optoelectronics
6
Papers
68
Citations
0.01
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (3)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Manufacturing implementation of deep-UV lithography for 500-nm devices
1992
Steven J. Holmes
Albert S. Bergendahl
Diana D. Dunn
J. Guidry
Mark C. Hakey
Karey L. Holland
Andy Horr
Dean C. Humphrey
Stephen E. Knight
D. Macaluso
Katherine C. Norris
Denis J Poley
Paul A. Rabidoux
John L. Sturtevant
Dean Writer
Show All
Source
Cite
Save
Citations (0)
Deep-ultraviolet lithography for 500-nm devices
1990
Steven J. Holmes
Ruth Levy
Albert S. Bergendahl
Karey L. Holland
John G. Maltabes
Stephen E. Knight
Katherine C. Norris
Denis J Poley
Show All
Source
Cite
Save
Citations (8)
Verfahren zum Plasma-Ätzen von metallischen Werkstoffen, die üblicherweise niedrig flüchtige Chloride bilden
1988
Robert Crowell Bausmith
William J. Cote
John Edward Cronin
Karey L. Holland
Carter Welling Kaanta
Pei-Ing Paul Lee
Terrance M. Wright
Show All
Source
Cite
Save
Citations (0)
1